Title :
Terahertz microsensor for biomedical applications
Author :
Perenzoni, Matteo ; Perenzoni, Daniele ; Stoppa, David ; Mulloni, Viviana ; Solazzi, Francesco ; Resta, Giuseppe ; Margesin, Benno
Author_Institution :
Center for Mater. & Microsyst., Fondazione Bruno Kessler, Trento, Italy
Abstract :
A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.
Keywords :
CMOS integrated circuits; bioMEMS; biomedical electronics; biomedical equipment; microfabrication; microsensors; readout electronics; antenna-coupled microbolometer; biasing; biomedical applications; custom MEMS technology; detector; device level reference sensor; electrical measurements; electronic time-correlation; integrated circuit; low-cost integrated microsensor; pulsed sources; readout; standard CMOS technology; Antennas; Bolometers; Detectors; Fabrication; Integrated circuits; Microsensors; Wires;
Conference_Titel :
BioPhotonics, 2011 International Workshop on
Conference_Location :
Parma
Print_ISBN :
978-1-4244-9836-9
Electronic_ISBN :
978-1-4244-9835-2
DOI :
10.1109/IWBP.2011.5954813
