Title :
MOCVD waste gas treatment
Author :
Geelen, A. Van ; Bink, P.H.M. ; Giling, L.J.
Author_Institution :
Dept. of Exp. Solid State Phys., Nijmegen Univ., Netherlands
Abstract :
A large scale production of GaAs based solar cells with MOCVD will give rise to a considerable use of arsine. Therefore a gas treatment system is needed to convert the waste gasses into less toxic compounds. In this study seven different gas treatment systems for MOCVD are compared by quantifying the environmental aspects. The systems are divided in wet systems, adsorption systems and thermal systems. The smallest amount of waste is produced by adsorption and thermal systems. Adsorption systems use the smallest amount of energy. The amount of primary materials used for the equipment varies per system. All systems are safe, but adsorption systems are simplest. At the moment adsorption systems are probably the best choice from an environmental point of view. Nevertheless thermal systems have some potential advantages which make them interesting for the future
Keywords :
chemical vapour deposition; solar cells; waste disposal; GaAs based solar cells; MOCVD waste gas treatment; adsorption systems; arsine; environmental aspects; thermal systems; wet systems; Building materials; Inductors; Large-scale systems; MOCVD; Photovoltaic cells; Physics; Production; Safety; Solid state circuits; Waste materials;
Conference_Titel :
Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
Conference_Location :
Louisville, KY
Print_ISBN :
0-7803-1220-1
DOI :
10.1109/PVSC.1993.347002
