A tester architecture suitable for MEMS calibration and testing

This poster outlines the working principle and an implementation of a tester architecture supporting MEMS calibration and testing; the tester works adaptively, providing electrical stimuli at run-time according to the collected results. The tester manages the calibration and testing process by means of a special hardware module, saving time and avoiding tester parallelism limitations due to massive wiring. Feasibility and effectiveness of the proposed method have been evaluated through simulations before being possibly introduced in commercial MEMS accelerometer testers.