Title :
In-situ PN junction formation during edge defined film-fed growth of silicon
Author :
Bathey, B.R. ; Cretella, M.C. ; Taylor, AS
Author_Institution :
Mobil Solar Energy Corp., Billerica, MA, USA
Abstract :
A novel method of forming a p-n junction during edge-defined film-fed growth (EFG) of silicon ribbons and nonagon tubes was developed using solid planar phosphorus dopant sources which were built into the crystal growth apparatus. The solid dopant sources were placed at an appropriate temperature location in the hot zone component of the growth system and adjacent to the growing crystal. The phosphorus gas evolved from the solid dopant source effectively doped the silicon crystal without contaminating the melt and a p-n junction was continuously formed on the entire length of the ribbon/tube during growth. Junction depths in the range of 750 Å to 3500 Å were obtained depending on the temperature of the source and the flow rate of the ambient argon gas in the growth furnace. Solar cells were fabricated on these wafers without the standard silicon etch and conventional diffusion steps. Ribbons where the base material was doped to 3.0 ohm-cm produced 9-11% efficiency solar cells. For nonagons, even though the sheet resistances were too high to be optimal and the base material was undoped in order to investigate back streaming of the phosphorus dopant, solar cells with efficiencies in the range of 8-8.5% resulted from this significant process simplification. This new process can be improved in the future for the current octagon growth technology and has the potential to substantially reduce the manufacturing cost of solar cells for terrestrial applications
Keywords :
crystal growth from melt; elemental semiconductors; p-n homojunctions; phosphorus; semiconductor doping; semiconductor growth; silicon; solar cells; 750 to 3500 angstrom; 8 to 8.5 percent; 9 to 11 percent; Si:P; base material; crystal growth; edge-defined film-fed growth; fabrication; manufacturing cost; nonagon tubes; p-n junction; process simplification; ribbons; sheet resistance; solar cells; solid dopant sources; terrestrial applications; Argon; Etching; Furnaces; P-n junctions; Photovoltaic cells; Sheet materials; Silicon; Solids; Temperature dependence; Temperature distribution;
Conference_Titel :
Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
Conference_Location :
Louisville, KY
Print_ISBN :
0-7803-1220-1
DOI :
10.1109/PVSC.1993.347068