DocumentCode :
2310650
Title :
Optical processing: a novel technology for fabricating solar cell contacts
Author :
Sopori, Bhushan L. ; Marshall, Craig ; Rose, Doug ; Jones, Kim M. ; Reedy, Robert ; Asher, Sally
Author_Institution :
Nat. Renewable Energy Lab., Golden, CO, USA
fYear :
1993
fDate :
10-14 May 1993
Firstpage :
97
Lastpage :
100
Abstract :
A novel semiconductor device processing technology is described that uses optical energy of a preselected spectrum to produce local melting at an illuminated semiconductor-metal (S-M) interface. This local melting results in an alloyed ohmic contact of very low contact resistivity. This process (called optical processing) takes place in a “cold wall” furnace, and is very insensitive to impurity contamination. The authors describe the application of optical processing to the formation of low-resistivity contacts on the front and back sides of a silicon solar cell in a one-step process. This process can result in considerable cost savings compared to conventional approaches for fabricating contacts on solar cells
Keywords :
economics; elemental semiconductors; ohmic contacts; semiconductor device manufacture; semiconductor-metal boundaries; silicon; solar cells; Si; alloyed ohmic contact; back side; cold wall furnace; contact resistivity; cost; fabrication; front side; impurity contamination; local melting; one-step process; optical processing; processing technology; semiconductor-metal interface; solar cell contacts; Conductivity; Contamination; Costs; Furnaces; Ohmic contacts; Optical devices; Photovoltaic cells; Semiconductor devices; Semiconductor impurities; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
Conference_Location :
Louisville, KY
Print_ISBN :
0-7803-1220-1
Type :
conf
DOI :
10.1109/PVSC.1993.347072
Filename :
347072
Link To Document :
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