• DocumentCode
    2310650
  • Title

    Optical processing: a novel technology for fabricating solar cell contacts

  • Author

    Sopori, Bhushan L. ; Marshall, Craig ; Rose, Doug ; Jones, Kim M. ; Reedy, Robert ; Asher, Sally

  • Author_Institution
    Nat. Renewable Energy Lab., Golden, CO, USA
  • fYear
    1993
  • fDate
    10-14 May 1993
  • Firstpage
    97
  • Lastpage
    100
  • Abstract
    A novel semiconductor device processing technology is described that uses optical energy of a preselected spectrum to produce local melting at an illuminated semiconductor-metal (S-M) interface. This local melting results in an alloyed ohmic contact of very low contact resistivity. This process (called optical processing) takes place in a “cold wall” furnace, and is very insensitive to impurity contamination. The authors describe the application of optical processing to the formation of low-resistivity contacts on the front and back sides of a silicon solar cell in a one-step process. This process can result in considerable cost savings compared to conventional approaches for fabricating contacts on solar cells
  • Keywords
    economics; elemental semiconductors; ohmic contacts; semiconductor device manufacture; semiconductor-metal boundaries; silicon; solar cells; Si; alloyed ohmic contact; back side; cold wall furnace; contact resistivity; cost; fabrication; front side; impurity contamination; local melting; one-step process; optical processing; processing technology; semiconductor-metal interface; solar cell contacts; Conductivity; Contamination; Costs; Furnaces; Ohmic contacts; Optical devices; Photovoltaic cells; Semiconductor devices; Semiconductor impurities; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
  • Conference_Location
    Louisville, KY
  • Print_ISBN
    0-7803-1220-1
  • Type

    conf

  • DOI
    10.1109/PVSC.1993.347072
  • Filename
    347072