• DocumentCode
    2310849
  • Title

    Application of ultraviolet laser in high density interconection micro blind via

  • Author

    Long, Faming ; He, Wei ; Chen, Yuanming ; Wang, Yanyan ; Hu, Ke ; He, Bo ; Mo, Yunqi

  • Author_Institution
    Key Lab. of Electron. Thin Films & Integrated Devices, UESTC, Chengdu, China
  • fYear
    2010
  • fDate
    20-22 Oct. 2010
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    The micro blind via drilling process is one of the crucial problems in the manufacture of high density interconnection printed circuit boards (HDI PCB). The main effect factors, which are the technological parameters of drilling process, were discussed in details by conducting an orthogonal experimental design (OED) study. The test result of the metallographic slicing tester show that the designed micro blind via has been obtained with above OED technological parameters. The regression equations between via depth and drill parameters have been obtained by Minitab Statistical Analysis Software. Precise control for blind via drilling can be realized by the regression equations.
  • Keywords
    drilling; integrated circuit interconnections; lasers; metallography; printed circuits; regression analysis; Minitab Statistical Analysis Software; OED technological parameters; drill parameters; high density interconection microblind via; high density interconnection; metallographic slicing tester; microblind via drilling process; orthogonal experimental design; printed circuit boards; regression equations; ultraviolet laser; Copper; Drilling; Equations; Helium; Power lasers; HDI (high density interconnection); Micro blind via; Orthogonal experimental design (OED); UV laser;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microsystems Packaging Assembly and Circuits Technology Conference (IMPACT), 2010 5th International
  • Conference_Location
    Taipei
  • ISSN
    2150-5934
  • Print_ISBN
    978-1-4244-9783-6
  • Electronic_ISBN
    2150-5934
  • Type

    conf

  • DOI
    10.1109/IMPACT.2010.5699470
  • Filename
    5699470