Novel microactuators based on a photo-thermo-mechanical actuation strategy

In this work an innovative actuation strategy based on a photo-thermo-mechanical energy conversion is presented. The actuation energy is typically higher than those required by the control and/or signal processing electronics, therefore this means a significant stress for the power supply. This challenge is particularly important if autonomous systems are taken into account. Small batteries don´t ensure sufficient autonomy, therefore external energy source should be considered. The basic idea is to provide the actuation energy to system through a light source, by directly exploiting the heat generation capability of the light. The truly innovative idea in this work is the use of micro-lenses coupled with thermal actuators to gain efficiency. The device presented here is a bimorph cantilever-beam that can be realized in any standard Si-technology. Few additional steps are required for the fabrication of the micro-lenses, commonly used for micro-optics and opto-electronics. In contrast to other off-chip power supply approaches, the one presented here does not require any structured environment or exotic materials.