Title :
Modelling Of The Ion Energy Spectrum In Electron Cyclotron Resonance Plasmas
Author :
Hussein, Mazen Abi ; Emmert
Author_Institution :
University of Wisconsin-Madison
Keywords :
Cyclotrons; Electrons; Microwave propagation; Plasma density; Plasma materials processing; Plasma sheaths; Plasma waves; Pulse compression methods; Pulse modulation; Resonance;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695614