Title :
CdS/CdTe solar cells by RF sputtering and by laser physical vapor deposition
Author :
Compaan, Alvin D. ; Tabory, Chlarles N. ; Li, Yuxin ; Feng, Zhirong ; Fischer, Andreas
Author_Institution :
Dept. of Phys. & Astron., Toledo Univ., OH, USA
Abstract :
Th authors have used excimer laser physical vapor deposition (LPVD) and RF magnetron sputtering for the growth of both CdS and CdTe films. In this paper, they discuss the essential features of these two techniques, address their differences, and compare some of the materials properties and device characteristics of solar cells fabricated by these two methods. Thus far, the authors have fabricated a 10.5% efficiency cell by LPVD and a 10.4% efficiency cell by RF sputtering
Keywords :
II-VI semiconductors; cadmium compounds; laser deposition; semiconductor device testing; semiconductor growth; semiconductor thin films; solar cells; sputter deposition; sputtered coatings; 10.4 percent; 10.5 percent; CdS-CdTe; RF sputtering; device characteristics; excimer laser physical vapor deposition; fabrication; magnetron; properties; semiconductor thin film growth; solar cells; Chemical vapor deposition; Glass; Laser ablation; Laser theory; Material properties; Photovoltaic cells; Pulsed laser deposition; Radio frequency; Sputtering; Temperature;
Conference_Titel :
Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
Conference_Location :
Louisville, KY
Print_ISBN :
0-7803-1220-1
DOI :
10.1109/PVSC.1993.347150
