Title :
Microminiature thermionic vacuum tube diodes
Author :
Sadwick, L.P. ; Zhang, Y.J. ; Schaeffer, D.J. ; Holmes, S.G. ; Petelenz, D.G. ; Hwu, R.J.
Author_Institution :
Dept. of Electr. Eng., Utah Univ., Salt Lake City, UT, USA
Abstract :
Details on the fabrication and testing of microminiature thermionic vacuum tube devices (i.e., diodes, triodes) with ultra-small (i.e., micron-scale) dimensions will be presented. The microminiature thermionic vacuum (MTV) devices can either have a direct or indirect heated cathode with an air-bridge filament supplying the thermal energy. Single device element architecture can consist of either a totally vertical structure or a combination of planar and vertical structures. The MTV devices are well suited to harsh environments and have the potential to operate at frequencies approaching the terahertz range.<>
Keywords :
diodes; thermionic cathodes; thermionic tubes; air-bridge filament; direct heated cathode; fabrication; harsh environments; indirect heated cathode; microminiature thermionic vacuum tube diodes; planar structure; single device element architecture; tershertz frequencies; testing; ultra-small micron-scale dimensions; vertical structure; Cathodes; Computer displays; Electron emission; Electron tubes; Fabrication; Microscopy; Semiconductor devices; Semiconductor diodes; Temperature; Testing;
Conference_Titel :
Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-1450-6
DOI :
10.1109/IEDM.1993.347200
