Title :
Highly linear capacitive pressure sensors with optimized electrode shapes
Author :
Benzel, H.W. ; Kallfass, T. ; Lueder, E.
Author_Institution :
Inst. for Network & Syst. Theory, Stuttgart Univ., Germany
Abstract :
A method for linearizing a capacitive pressure sensor with a circular diaphragm by optimization of the electrode shapes is described. First a sensor with pressure dependent reference capacitor is used to linearize the ratio of the reference and the sensing capacitor. To improve the linearity furthermore a third pressure dependent capacitor in the sensor is added. An integrated CMOS amplifier using switched capacitor techniques is used to readout the sensor capacitors. Finally the measurement results of a thick-film sensor with a hybrid readout circuit are given.<>
Keywords :
CMOS integrated circuits; electrodes; linear integrated circuits; linearisation techniques; pressure sensors; signal processing equipment; thick film devices; capacitive pressure sensors; circular diaphragm; hybrid readout circuit; integrated CMOS amplifier; linearisation; optimized electrode shapes; pressure dependent capacitor; switched capacitor techniques; thick-film sensor; Capacitive sensors; Capacitors; Electrodes; Integrated circuit measurements; Linearity; Optimization methods; Sensor phenomena and characterization; Shape; Thick film sensors; Thickness measurement;
Conference_Titel :
Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-1450-6
DOI :
10.1109/IEDM.1993.347241
