Spot Mura evaluation in TFT-LCDs using automatic optical inspection

Author

Tzu, Fu-Ming ; Chou, Jung-Hua

Author_Institution

Dept. of Eng. Sci., Nat. Cheng Kung Univ., Tainan, Taiwan

fYear

2010

fDate

20-22 Oct. 2010

Firstpage

1

Lastpage

4

Abstract

A quantitative automatic optical inspection (AOI) is developed to detect spot Mura in the green layer of the color filter for TFT-LCDs through the linear transmittance light engaged with digital imaging. It can detect a color range at 0.001 of CIE xyY, even lower than the just noticeable difference (JND). Further, a reflective spectrometer can identify the tendency of CIE y at the green layer, which is a convex profile for a thick film and concave profile for a thin film. The line scan photo sensor is capable of detection to 0.3 along with spot non-uniformity for the color difference of CIEDE 2000, and even lower.

Keywords

automatic optical inspection; liquid crystal displays; optical filters; spectrometers; thin film transistors; TFT-LCD; automatic optical inspection; color filter; concave profile; convex profile; digital imaging; green layer; line scan photo sensor; linear transmittance light; reflective spectrometer; spot mura detection; thick film; thin film; Image color analysis; Light emitting diodes; Optical filters; Optical imaging; Optical reflection; Optical sensors; chromaticify; difference; inspection; optical; spot;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems Packaging Assembly and Circuits Technology Conference (IMPACT), 2010 5th International

Conference_Location

Taipei

ISSN

2150-5934

Print_ISBN

978-1-4244-9783-6

Electronic_ISBN

2150-5934

Type

conf

DOI

10.1109/IMPACT.2010.5699583

Filename

5699583