Title :
Implementation of accelerometer in CMOS-MEMS
Author :
Kuo, Tsung-Chi ; Lai, Shih-Wei ; Kiang, Jean-Fu
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A fully-differential capacitive accelerometer is designed and implemented using TSMC 0.35μm 2P4M CMOS-MEMS process. The measured sensitivity is 53 mV/g.
Keywords :
CMOS image sensors; accelerometers; capacitive sensors; CMOS-MEMS process; TSMC; differential capacitive accelerometer; size 0.35 mum; Acceleration; Accelerometers; CMOS integrated circuits; CMOS technology; Capacitance; Micromechanical devices; Sensors;
Conference_Titel :
Microsystems Packaging Assembly and Circuits Technology Conference (IMPACT), 2010 5th International
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-9783-6
Electronic_ISBN :
2150-5934
DOI :
10.1109/IMPACT.2010.5699592
