Accelerated Monte Carlo modeling of an RTCVD-reactor

Monte Carlo simulation is an indispensable tool for modeling Rapid Thermal Processes (RTP) with an accuracy of a few degrees. Only this method allows very detailed modeling of the physical processes and geometric complications which arise in real applications involving radiation transport. A well known disadvantage of the standard Monte Carlo method is slow convergence. A significant improvement in computation time, however, can be achieved by using Quasi-Monte Carlo (QMC) methods to simulate radiative heat transfer. We apply this method to the simulation of a RTCVD-reactor. Together with the solution of the conduction and convection problem with the simulator PHOENICS we achieve a detailed understanding of the transport mechanisms inside the reactor. The results demonstrate the necessity to include the effects of reflection law of radiation, spectral dependence and geometrical details to achieve a simulation of very high accuracy. The diffuse approximation is insufficient for that purpose.<>