DocumentCode
2313469
Title
Analogic fiber optic position sensor with nanometric resolution
Author
Lamarque, Frédéric ; Prelle, Christine
Author_Institution
Lab. Roberval de Mecanique, Univ. de Technol. de Compiegne, France
Volume
2
fYear
2002
fDate
2002
Firstpage
926
Abstract
This paper describes a miniature analogic position sensor. This sensor is dedicated to high resolution displacement measurement (10 nm) between two positions over a long range (a few millimeters). The working principle of the sensor is presented as well as experimental results.
Keywords
diffraction gratings; displacement measurement; fibre optic sensors; displacement measurement; fiber optic position sensor; nanometric resolution; resolution; Capacitive sensors; Displacement measurement; Mirrors; Optical fiber sensors; Optical fibers; Optical interferometry; Optical sensors; Position measurement; Sensor phenomena and characterization; Size measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037233
Filename
1037233
Link To Document