A vibrating micro-resonator design for gyroscope applications using TIA

This paper presents a vibrating micro-resonator using transimpedance amplifier (TIA) for gyroscope applications. First, a gyroscope model is built for sensor design. The critical parameters are optimized by theoretical calculation and fine tuned by finite-element-analysis (FEM). Then, SOG-bulk micromachining and deep reactive ion etching (DRIE) are adopted to fabricate the gyroscope with high aspect-ratio sensing structure and high yield. Finally, an ASIC, TIA with large on-chip transimpedance is developed for driving loop to accomplish a self-oscillated micro-resonator.