Title :
The experimental study of high TCR Pt thin films for thermal sensors
Author :
Tsutsumi, Kazuhiko ; Yamashita, Akira ; Ohji, Hiroshi
Author_Institution :
Himeji Works, Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
Presents some results of temperature coefficient of resistance (TCR) measurements on platinum (Pt) thin films as a detecting resistive material for thermal type sensors. We have shown that by using an oxidized Si substrate with a SiNx layer and an Al2O3 buffer layer, the obtained TCR value is 3.7×10-3/°C after annealing at 1100°C in air. It is expected that this result will lead to the improvement of thermal microsensors.
Keywords :
annealing; electric sensing devices; microsensors; platinum; sputtered coatings; temperature sensors; 1100 degC; Si-SiO2-SiNx-Al2O3-Pt; TCR value; annealing; detecting resistive material; microsensors; temperature coefficient of resistance; thermal sensors; Annealing; Conductivity; Electric variables measurement; Electrical resistance measurement; Resistors; Scanning electron microscopy; Temperature; Thermal sensors; Thin film sensors; X-ray diffraction;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037248
