Title :
Limitations of heat conductivity in cryogenic sensors due to surface roughness [X-ray detection]
Author :
Moktadir, Z. ; Bruijn, M.P. ; Wiegerink, R. ; Elwenspoek, M. ; Ridder, M. ; Mels, W.A.
Author_Institution :
Twente Univ., Enschede, Netherlands
Keywords :
X-ray detection; cryogenics; etching; finite element analysis; surface topography; Si; X-ray detection; approximate calculations; cryogenic sensors; etching; finite element modeling; heat conductivity; heat transport; nonlinear heat equation; sensor performance; smoothness; surface roughness; Acoustic scattering; Conducting materials; Conductivity; Cryogenics; Phonons; Rough surfaces; Surface roughness; Temperature; Thermal sensors; X-ray imaging;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037252
