DocumentCode
2313915
Title
ARROW-based optical accelerometers
Author
Llobera, A. ; Plaza, J.A. ; Salinas, I. ; Berganzo, J. ; Garcia, J. ; Esteve, J. ; Dominguez, C.
Author_Institution
Centro Nacional de Microelectron., Univ. Autonoma de Barcelona, Spain
Volume
2
fYear
2002
fDate
2002
Firstpage
1075
Abstract
Design, fabrication and characterization of silicon-based stress-free self-aligned quad beam accelerometer is presented. Standard total internal reflection waveguides have been replaced by ARROW structures, enhancing the sensitivity to >4dB/g at the wavelength visible range (633nm) Moreover, as the waveguide core has approximately the same size as the input fiber optic, insertion losses have been reduced to 2.5dB. Attenuation in ARROW waveguides is 0.3dB/cm.
Keywords
accelerometers; arrayed waveguide gratings; elemental semiconductors; micro-optics; microsensors; optical losses; optical sensors; silicon; 2.5 dB; 633 nm; ARROW waveguides; ARROW-based optical accelerometers; Si; insertion losses; sensitivity; stress-free self-aligned quad beam accelerometer; waveguide core; wavelength visible range; Accelerometers; Electromagnetic waveguides; Integrated optics; Optical attenuators; Optical films; Optical losses; Optical refraction; Optical sensors; Optical waveguides; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037262
Filename
1037262
Link To Document