Title :
Energy trapping in mesa-shaped quartz crystal microbalance
Author :
Shen, F. ; Lee, K.H. ; Lu, P. ; Shea, S. J O
Author_Institution :
Inst. for High Performance Comput., Singapore, Singapore
Abstract :
In this paper, the energy trapping problem in AT-cut quartz mesa structures is studied. Results show that the mesa structure is able to trap thickness-shear vibration energy within a much smaller area compared with a conventional electroded plate. The optimum sizes of these mesa structures are obtained through this study.
Keywords :
crystal resonators; microbalances; micromechanical resonators; AT-cut quartz mesa structures; Mindlin´s one-dimensional theory; SiO2; energy trapping; mesa-shaped quartz crystal microbalance; mode coupling; multichannel resonator; thickness-shear vibration energy; Coupled mode analysis; Elasticity; Electrodes; Equations; Motion analysis; Power engineering and energy; Structural beams; Vibrations; Voltage;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037277
