• DocumentCode
    2314143
  • Title

    Energy trapping in mesa-shaped quartz crystal microbalance

  • Author

    Shen, F. ; Lee, K.H. ; Lu, P. ; Shea, S. J O

  • Author_Institution
    Inst. for High Performance Comput., Singapore, Singapore
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1154
  • Abstract
    In this paper, the energy trapping problem in AT-cut quartz mesa structures is studied. Results show that the mesa structure is able to trap thickness-shear vibration energy within a much smaller area compared with a conventional electroded plate. The optimum sizes of these mesa structures are obtained through this study.
  • Keywords
    crystal resonators; microbalances; micromechanical resonators; AT-cut quartz mesa structures; Mindlin´s one-dimensional theory; SiO2; energy trapping; mesa-shaped quartz crystal microbalance; mode coupling; multichannel resonator; thickness-shear vibration energy; Coupled mode analysis; Elasticity; Electrodes; Equations; Motion analysis; Power engineering and energy; Structural beams; Vibrations; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037277
  • Filename
    1037277
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2314143