• DocumentCode
    2314226
  • Title

    Microsystems based on surface micromachined mechanisms

  • Author

    Oliver, Andrew D. ; Peter, Frank J. ; Polosky, Marc A.

  • Author_Institution
    Electromech. Eng. Dept., Sandia Nat. Labs., Albuquerque, NM, USA
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1188
  • Abstract
    In this paper, we describe some of the design considerations that turn a surface micromachined mechanism from a technological curiosity into a functional and useful device. Some relevant factors include: device design, actuators, drive signals, and packaging. The paper concludes with two example microsystems.
  • Keywords
    micromachining; micromechanical devices; semiconductor device packaging; MEMS; actuators; design considerations; drive signals; microsystems; packaging; surface micromachined mechanisms; Actuators; Electrostatics; Micromachining; Packaging; Protection; Rough surfaces; Silicon; Surface discharges; Surface roughness; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037283
  • Filename
    1037283
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2314226