Title :
Micromachined sensors for automotive applications
Author :
Marek, Jiri ; Illing, Marko
Author_Institution :
Robert Bosch GmbH, Reutlingen, Germany
Abstract :
The paper gives an overview of recent advances in sensor technology, primarily in silicon micromachining. The importance and use of these sensor technologies in automotive applications is shown. Finally an outlook on important current developments and new functions in the car will be given.
Keywords :
automotive electronics; micromachining; microsensors; pressure sensors; MEMS; automotive applications; micromachined sensors; microsystems; pressure sensors; sensor technology; Automotive applications; Automotive engineering; Biomembranes; Bridge circuits; Costs; Engines; Fuels; Manufacturing industries; Paper technology; Silicon;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037355
