Title :
Touch mode capacitive pressure sensor for passive tire monitoring system
Author :
Yamamoto, Seiichi ; Nakao, Osamu ; Nishimura, Hideki
Author_Institution :
Electron Device Lab., Fujikura Ltd., Tokyo, Japan
Abstract :
This paper deals with silicon capacitive pressure sensor called "touch-mode" type . A touch mode capacitive pressure sensor that can be used in automobile tire pressure monitoring systems has been developed, and its structure and the fabrication process are described The morphology of the chemically etched diaphragm surface, which has a great influence on fracture toughness of the diaphragm, is focused on.
Keywords :
automotive electronics; capacitive sensors; elemental semiconductors; monitoring; pressure sensors; silicon; Si; automobile; capacitive pressure sensor; chemically etched diaphragm surface; fabrication process; fracture toughness; morphology; passive tire monitoring system; tire pressure monitoring systems; Automobiles; Capacitive sensors; Chemical sensors; Fabrication; Monitoring; Sensor phenomena and characterization; Sensor systems; Silicon; Tactile sensors; Tires;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037359
