Algorithms for the analysis of ultrathin samples with terahertz time domain spectroscopy

Author

Scheller, Maik ; Jansen, Christian ; Koch, Martin

Author_Institution

TU Braunschweig, Inst. fur Hochfrequenztech., Braunschweig, Germany

fYear

2009

fDate

21-25 Sept. 2009

Firstpage

1

Lastpage

2

Abstract

We present a time domain and a frequency domain based algorithm for the analysis of spectroscopic terahertz data. The thickness information as well as the frequency dependent complex material parameters are extracted. Both methods can evaluate data obtained from measurements on sub-100mum thick samples, even in case of overlapping Fabry Perot echoes in the time domain. While the frequency domain approach provides highest accuracy, the time domain method is extremely computation efficient, enabling real time data extraction.

Keywords

elemental semiconductors; frequency-domain analysis; refractive index; refractive index measurement; semiconductor thin films; silicon; spectroscopy computing; terahertz spectroscopy; terahertz wave spectra; time-domain analysis; Fabry Perot echoes; Si; frequency dependent complex material parameters; frequency domain approach; refractive indices; silicon wafer; terahertz time domain spectroscopy; ultrathin samples; Algorithm design and analysis; Data mining; Frequency domain analysis; Optical pulses; Pulse measurements; Pulse shaping methods; Refractive index; Spectroscopy; Time domain analysis; Transfer functions;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on

Conference_Location

Busan

Print_ISBN

978-1-4244-5416-7

Electronic_ISBN

978-1-4244-5417-4

Type

conf

DOI

10.1109/ICIMW.2009.5324656

Filename

5324656