Title :
Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing
Author :
Sriram, Sharath ; Bhaskaran, Madhu ; Mitchell, Arnan
Author_Institution :
Platform Technol. Res. Inst., RMIT Univ., Melbourne, VIC, Australia
Abstract :
New deposition regimes for strontium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlined in this work. Optimised conditions have enabled the demonstration of an intermetallic reaction driven self-assembly process for formation of islands of piezoelectric and the use of lattice guiding by a metal layer to perform low temperature deposition of piezoelectric thin films.
Keywords :
island structure; lead compounds; low-temperature techniques; piezoelectric thin films; self-assembly; sputter deposition; strontium; PZT:Sr; Si; intermetallic reaction; low temperature deposition; metal layer; piezoelectric thin film deposition; self-assembled island structures; silicon substrates; strontium-doped lead zirconate titanate; Magnetic analysis; Titanium compounds;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
978-1-4244-7334-2
Electronic_ISBN :
1097-2137
DOI :
10.1109/COMMAD.2010.5699762
