Title :
Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography
Author :
Han, T. ; Madden, S. ; Bulla, Douglas ; Luther-Davies, Barry
Author_Institution :
Centre for Ultrahigh Bandwidth Devices for Opt. Syst., Australian Nat. Univ., Canberra, ACT, Australia
Abstract :
We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.
Keywords :
arsenic compounds; chalcogenide glasses; light polarisation; nanolithography; optical fabrication; optical glass; optical losses; optical waveguides; rib waveguides; selenium compounds; semiconductor growth; soft lithography; sulphur compounds; As24S38Se38; TE polarization; TM polarization; chalcogenide glass rib waveguides; optical losses; size 2 mum to 4 mum; thermal nanoimprint lithography; Chemical elements; Lead; Optical device fabrication; Optical polarization; Optical waveguides;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
978-1-4244-7334-2
Electronic_ISBN :
1097-2137
DOI :
10.1109/COMMAD.2010.5699775
