Title :
Integration of fiber optic lenses with small form factor MEMS components
Author :
Mirza, A. ; Wu, G. ; Gamage, S. ; Ukrainczyk, L. ; Shashidhar, N.
Author_Institution :
GE NovaSensor, Fremont, CA, USA
Abstract :
Passively alignable lensed fiber was designed to enable significantly reduced component assembly costs with optical MEMS devices. Passive alignment with <0.5 dB loss/pair was demonstrated. Integration of lensed fiber with small form factor MEMS switch on silicon chip was demonstrated.
Keywords :
elemental semiconductors; integrated optics; lenses; micro-optics; microswitches; optical fibres; silicon; 50 dB; Si; fiber optic lenses; optical MEMS devices; optical integration; passively alignable lensed fiber; silicon chip; small form factor MEMS switch; Assembly; Costs; Lenses; Microelectromechanical devices; Micromechanical devices; Optical design; Optical devices; Optical fiber devices; Optical fibers; Optical losses;
Conference_Titel :
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN :
1-55752-746-6
DOI :
10.1109/OFC.2003.1247485
