Title :
Development of THz ellipsometer with variable incident angle
Author :
Matsumoto, Naoki ; Nagashima, Takeshi ; Fujii, Takashi ; Takagi, Hiroshi ; Hangyo, Masanori
Author_Institution :
Murata Manuf. Co. Ltd., Nagaokakyo, Japan
Abstract :
We have developed a THz ellipsometer with a variable incident angle based on the time-domain spectroscopy. The dielectric responses of soft-phonon mode in SrTiO3 bulk single crystal and 1 mum thick thin film grown on Pt/MgO substrates are demonstrated.
Keywords :
ellipsometers; magnesium compounds; permittivity; phonons; platinum compounds; strontium compounds; substrates; terahertz spectroscopy; time-domain analysis; titanium compounds; Pt-MgO; SrTiO3; THz ellipsometer; dielectric response; size 1 mum; soft-phonon mode; substrate; thin film growth; time-domain spectroscopy; variable incident angle; Crystalline materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Ellipsometry; High K dielectric materials; Mirrors; Polarization; Semiconductor materials; Time domain analysis;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5324722
