Influences of ambient gases upon emission characteristics of Mo-FEAs during frit sealing process

Author

Kim, Hoon ; Ju, Byeong Kwon ; Lee, Kwang Bae ; Kang, Moon Sik ; Jang, Jin ; Oh, Myung Hwan

Author_Institution

Electron. Mater. & Devices Res. Center, KIST, Seoul, South Korea

fYear

1998

fDate

19-24 July 1998

Firstpage

67

Lastpage

68

Abstract

The influences of ambient gases on the packaging of Spindt-type Mo-field emitter arrays (FEAs) in the atmoshere were studied through electrical field emission characteristics and Mo surface analysis according to various ambient gases (N/sub 2/, Ar and air). Also electrical field emission characteristics in an ultra high vacuum chamber and Mo surface analysis were performed after breaking the sealing lines to expose the FEAs. We can obtain increased electron emission current for each pixel by using Ar gas when compared with other gases during frit process.

Keywords

Auger electron spectra; argon; arrays; field emission displays; molybdenum; nitrogen; packaging; seals (stoppers); AES; Ar; Ar gas; Mo; Mo FEAs; Mo surface analysis; N/sub 2/; Spindt-type; ambient gases; electrical field emission characteristics; electron emission current; field emitter arrays; frit sealing process; packaging; ultra high vacuum chamber; Annealing; Argon; Atmosphere; Gases; Packaging; Performance analysis; Physics; Sealing materials; Surface morphology; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1998. Eleventh International

Conference_Location

Asheville, NC, USA

Print_ISBN

0-7803-5096-0

Type

conf

DOI

10.1109/IVMC.1998.728642

Filename

728642