Title :
Influences of ambient gases upon emission characteristics of Mo-FEAs during frit sealing process
Author :
Kim, Hoon ; Ju, Byeong Kwon ; Lee, Kwang Bae ; Kang, Moon Sik ; Jang, Jin ; Oh, Myung Hwan
Author_Institution :
Electron. Mater. & Devices Res. Center, KIST, Seoul, South Korea
Abstract :
The influences of ambient gases on the packaging of Spindt-type Mo-field emitter arrays (FEAs) in the atmoshere were studied through electrical field emission characteristics and Mo surface analysis according to various ambient gases (N/sub 2/, Ar and air). Also electrical field emission characteristics in an ultra high vacuum chamber and Mo surface analysis were performed after breaking the sealing lines to expose the FEAs. We can obtain increased electron emission current for each pixel by using Ar gas when compared with other gases during frit process.
Keywords :
Auger electron spectra; argon; arrays; field emission displays; molybdenum; nitrogen; packaging; seals (stoppers); AES; Ar; Ar gas; Mo; Mo FEAs; Mo surface analysis; N/sub 2/; Spindt-type; ambient gases; electrical field emission characteristics; electron emission current; field emitter arrays; frit sealing process; packaging; ultra high vacuum chamber; Annealing; Argon; Atmosphere; Gases; Packaging; Performance analysis; Physics; Sealing materials; Surface morphology; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728642
