Title :
Electron stimulated desorption of FED phosphors
Author :
Trottier, Troy A. ; Chalamala, Babu R. ; Petersen, Ronald O. ; Stainer, Matthew
Author_Institution :
Flat Panel Display Div., Motorola Inc., Tempe, AZ, USA
Abstract :
Field emission cathode arrays are sensitive to contamination by residual gases present in the vacuum envelope. One source of such gases in packaged field emission displays is the electron beam induced desorption of display phosphors. In this paper, we report measurements of electron stimulated desorption (ESD) of gaseous species from two blue powder phosphors, namely Y/sub 2/SiO/sub 5/:Ce and ZnS:Ag,Cl. The ESD measurements were made for beam energies from 100 to 5000 eV, with DC current densities of 10 to 200 /spl mu/A/cm/sup 2/. The gas species evolved from phosphor desorption were analyzed with a high resolution quadrupole mass spectrometer placed directly in line of sight of the excitation area.
Keywords :
cerium; chlorine; electron stimulated desorption; field emission displays; phosphors; powders; silver; stability; yttrium compounds; zinc compounds; 100 to 5000 eV; ESD measurements; FEA; FED phosphors; Y/sub 2/SiO/sub 5/:Ce; ZnS:Ag,Cl; blue powder phosphors; contamination; display phosphors; electron beam induced desorption; electron stimulated desorption; field emission cathode arrays; high resolution quadrupole mass spectrometer; mass spectra; packaged field emission displays; phosphor desorption; residual gases; vacuum envelope; Cathodes; Contamination; Electron beams; Electrostatic discharge; Flat panel displays; Gases; Packaging; Phosphors; Pollution measurement; Powders;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728646