Noise figure and S-parameter measurement setups for on-wafer differential 60GHz circuits

On-wafer measurement setups are introduced for measuring the noise figure and s-parameters of differential 60GHz circuits. The need for expensive four-port mm-wave vector network analyzers is circumvented by using magic-Ts, providing a minimum CMRR of 20dB, in combination with cheaper two-port mm-wave network analyzers. Waveguide interfaces are used in the vicinity of the RF probes to achieve a robust and repeatable setup, as the cables at mm-wave frequencies are prone to impedance and delay variation due to movement and bending. The noise figure of a double-balanced 60GHz mixer and the noise figure and s-parameters of a differential 60GHz LNA are measured using this setup and the measurement results are in good agreement with the simulations.