DocumentCode
2318553
Title
Emission microscope studies on FEAs
Author
Yamane, K. ; Muto, Y. ; Kawata, S. ; Nakane, H. ; Adachi, H.
Author_Institution
Muroran Inst. of Technol., Hokkaido, Japan
fYear
1998
fDate
19-24 July 1998
Firstpage
92
Lastpage
93
Abstract
Electron emission from a FEA was magnified by making use of an emission microscope, and the uniformity of the electron emission was examined. By resolving the electron emission from each microtip, the electron emission stability from a single microtip was successfully measured.
Keywords
electron field emission; field emission electron microscopy; vacuum microelectronics; FEA; electron emission; emission microscopy; microtip; Electrodes; Electron beams; Electron emission; Electron optics; Electrostatics; Lenses; Microscopy; Optical scattering; Stimulated emission; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location
Asheville, NC, USA
Print_ISBN
0-7803-5096-0
Type
conf
DOI
10.1109/IVMC.1998.728655
Filename
728655
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