Title :
Emission microscope studies on FEAs
Author :
Yamane, K. ; Muto, Y. ; Kawata, S. ; Nakane, H. ; Adachi, H.
Author_Institution :
Muroran Inst. of Technol., Hokkaido, Japan
Abstract :
Electron emission from a FEA was magnified by making use of an emission microscope, and the uniformity of the electron emission was examined. By resolving the electron emission from each microtip, the electron emission stability from a single microtip was successfully measured.
Keywords :
electron field emission; field emission electron microscopy; vacuum microelectronics; FEA; electron emission; emission microscopy; microtip; Electrodes; Electron beams; Electron emission; Electron optics; Electrostatics; Lenses; Microscopy; Optical scattering; Stimulated emission; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728655
