DocumentCode :
2318578
Title :
Data and numerical analysis of FEA experiments with linear planar lenses
Author :
Tang, Cha-Mei
Author_Institution :
Creatv Micro Tech. Inc., Potomac, MD, USA
fYear :
1998
fDate :
19-24 July 1998
Firstpage :
96
Abstract :
Summary form only given. Conventional gated field-emitter arrays (FEAs) typically emit electrons with wide angular spread. Our experiments show that a line of gated field-emitters emit a collimated sheet beam of electrons. The configuration that produces these results consists of a line of gated FEAs with focusing provided by lenses on either side of the gate electrode and coplanar with the gate electrode. The full-width-half-maximum of the beam is less than 35 microns, when measured at the anode 10 mm from the cathode. This is a reduction of the width of the beam by about a factor of hundred as compared to the width of the beam when no focusing field is applied. The results indicate that integrated focusing lenses can be very effective in collimating the electron beam from gated field emitters. The FEAs were fabricated by MCNC.
Keywords :
electron beam focusing; electron field emission; electron lenses; vacuum microelectronics; FEA; electron collimation; field emitter array; integrated focusing lens; linear planar lens; Anodes; Cathodes; Collimators; Electrodes; Electron emission; Field emitter arrays; Lakes; Lenses; NIST; Numerical analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
Type :
conf
DOI :
10.1109/IVMC.1998.728657
Filename :
728657
Link To Document :
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