Improving on-wafer measurements with membrane-technology-based calibration standards

In this paper we discuss the advantages of on-wafer calibration standards fabricated in membrane technology in comparison to standards built in conventional thin-film technology. Based on Monte Carlo simulations we investigate the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards. For coplanar waveguides used as line standards we demonstrate that, depending on the electromagnetic waveguide property we look at, an up to tenfold reduction in uncertainty can be achieved.