Title :
Estimation of tip´s resistance from measured I-V plots of emission current
Author :
Bormatova, L. ; Galdetskiy, A. ; Zhirnov, V.
Author_Institution :
Inst. of Crystallogr., Moscow, Russia
Abstract :
A technique of estimation of tip´s resistance is considered. It is based measuring of deviation of emission current I-V plot from Fowler-Nordheim curve. Some results are presented on resistance measurements for silicon whiskers grown by vapor-liquid-solid technique and having various coatings. Resistance of Ni-coated tips is in the range 0.8-1.2 10/sup 8/ Ohm.
Keywords :
electric resistance measurement; electron field emission; elemental semiconductors; silicon; vacuum microelectronics; whiskers (crystal); FEA tip; Fowler-Nordheim curve; I-V characteristics; Si-Ni; emission current; nickel coating; resistance measurement; silicon whisker; vapor-liquid-solid growth; Coatings; Crystallography; Current density; Current measurement; Electrical resistance measurement; Flat panel displays; Least squares approximation; Silicon; Surface resistance; Voltage measurement;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728664
