DocumentCode :
2318731
Title :
A non lithographic technique for the production of large area high density gridded field emission sources
Author :
Holland, E.R. ; Harrison, M.T. ; Huang, M. ; Wilshaw, P.R.
Author_Institution :
Dept. of Mater., Oxford Univ., UK
fYear :
1998
fDate :
19-24 July 1998
Firstpage :
109
Lastpage :
110
Abstract :
We report a novel method for the production of high density arrays of gridded microtip field emission electron sources. The microporous structure of Al/sub 2/O/sub 3/, formed by anodisation of Aluminium, is exploited to provide a high density (10/sup 9/ sites cm/sup -2/) of sites for emitter fabrication without the need for individual lithographic patterning of each emitter. The small size of the resultant emitters enables operation with only moderate extraction voltage (20-50 V). Tests of groups of /spl ap/400,000 emitters have demonstrated emission current densities suitable for display applications.
Keywords :
alumina; anodised layers; electron field emission; electron sources; porous materials; vacuum microelectronics; 20 to 50 V; Al/sub 2/O/sub 3/; FEA; anodisation; current density; fabrication; gridded microtip field emission electron source; large area high density array; microporous structure; nonlithographic technique; Aluminum; Biomembranes; Cathodes; Current density; Fabrication; Nickel; Production; Testing; Voltage; Wires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
Type :
conf
DOI :
10.1109/IVMC.1998.728665
Filename :
728665
Link To Document :
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