• DocumentCode
    2318896
  • Title

    Particle and power balances of hot-filament discharge plasmas in a multi-dipole device in the presence of a positively biased electrode

  • Author

    Cho, Mu-Hee ; Hershkowitz, Noah ; Intrator, T.

  • Author_Institution
    Wisconsin Univ., Madison, WI, USA
  • fYear
    1989
  • fDate
    0-0 1989
  • Firstpage
    76
  • Abstract
    Summary Form only given, as follows. The plasma potential is typically assumed to float above an anode potential by an amount that is a few times the electron temperature (T/sub e//e). The difference between the plasma potential and the anode potential can be estimated by considering the particle production and loss. However, it has been reported experimentally that the plasma potential of a steady-state plasma can be more negative than the anode potential with a potential dip ( approximately T/sub e//e) in front of the anode. Particle and power balances have been carried out to estimate the bulk plasma potential of a hot-filament discharge plasma produced in a multidipole plasma device. The bulk plasma potential dependence on the positive DC bias applied to the anode is analyzed, and the predicted characteristics of the plasma potential dependence are compared to the experimental results. A steady-state potential dip in front of the anode has been experimentally observed using emissive probes with the zero emission inflection point method, and the conditions for the potential dip formation have been derived.<>
  • Keywords
    discharges (electric); plasma theory; anode potential; bulk plasma potential dependence; electron temperature; emissive probes; hot-filament discharge plasma; multidipole plasma device; particle balances; particle production; plasma potential; positive DC bias; positively biased electrode; potential dip; power balances; steady-state plasma; steady-state potential dip; zero emission inflection point method; Gas discharges;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1989. IEEE Conference Record - Abstracts., 1989 IEEE International Conference on
  • Conference_Location
    Buffalo, NY, USA
  • Type

    conf

  • DOI
    10.1109/PLASMA.1989.166063
  • Filename
    166063