DocumentCode
2318896
Title
Particle and power balances of hot-filament discharge plasmas in a multi-dipole device in the presence of a positively biased electrode
Author
Cho, Mu-Hee ; Hershkowitz, Noah ; Intrator, T.
Author_Institution
Wisconsin Univ., Madison, WI, USA
fYear
1989
fDate
0-0 1989
Firstpage
76
Abstract
Summary Form only given, as follows. The plasma potential is typically assumed to float above an anode potential by an amount that is a few times the electron temperature (T/sub e//e). The difference between the plasma potential and the anode potential can be estimated by considering the particle production and loss. However, it has been reported experimentally that the plasma potential of a steady-state plasma can be more negative than the anode potential with a potential dip ( approximately T/sub e//e) in front of the anode. Particle and power balances have been carried out to estimate the bulk plasma potential of a hot-filament discharge plasma produced in a multidipole plasma device. The bulk plasma potential dependence on the positive DC bias applied to the anode is analyzed, and the predicted characteristics of the plasma potential dependence are compared to the experimental results. A steady-state potential dip in front of the anode has been experimentally observed using emissive probes with the zero emission inflection point method, and the conditions for the potential dip formation have been derived.<>
Keywords
discharges (electric); plasma theory; anode potential; bulk plasma potential dependence; electron temperature; emissive probes; hot-filament discharge plasma; multidipole plasma device; particle balances; particle production; plasma potential; positive DC bias; positively biased electrode; potential dip; power balances; steady-state plasma; steady-state potential dip; zero emission inflection point method; Gas discharges;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1989. IEEE Conference Record - Abstracts., 1989 IEEE International Conference on
Conference_Location
Buffalo, NY, USA
Type
conf
DOI
10.1109/PLASMA.1989.166063
Filename
166063
Link To Document