• DocumentCode
    2318937
  • Title

    MOSFET-structured Si emitter tips with a focusing lens

  • Author

    Itoh, Junji ; Kagawa, Yoshitaka ; Kanemaru, Seigo

  • Author_Institution
    Electrotech. Lab., Tsukuba, Japan
  • fYear
    1998
  • fDate
    19-24 July 1998
  • Firstpage
    128
  • Lastpage
    129
  • Abstract
    In this paper, we present a newly-developed emitter structure consisting of a double-gated tip and a built-in metal-insulator-semiconductor field-effect-transistor (MOSFET-gun). This idea is based on remarkable results on the emission current stabilization recently obtained with a MOSFET-tip.
  • Keywords
    MOSFET; electron beam focusing; electron field emission; electron guns; electron lenses; elemental semiconductors; silicon; vacuum microelectronics; MOSFET gun; Si; Si field emitter; double-gated tip; electron beam; emission current stability; focusing lens; Electron beams; Electron emission; Electronic mail; Laboratories; Lenses; MOSFET circuits; Silicon; Stability; Virtual colonoscopy; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1998. Eleventh International
  • Conference_Location
    Asheville, NC, USA
  • Print_ISBN
    0-7803-5096-0
  • Type

    conf

  • DOI
    10.1109/IVMC.1998.728675
  • Filename
    728675