DocumentCode
2319081
Title
Emission limiting in silicon field emitters
Author
Shaw, Jonathan L. ; Gray, Henry F.
Author_Institution
Naval Res. Lab., Washington, DC, USA
fYear
1998
fDate
19-24 July 1998
Firstpage
146
Lastpage
147
Abstract
The success of a field emitter array (FEA) as a high frequency or high brightness source is critically dependent on the FEA´s maximum total current and current density. To date, damage and shorts typically limit the maximum current obtained from high current density FEAs (those not containing large resistances in series with each tip). Because it is not clear what mechanism or what per-tip current initiates the damage, it is difficult to predict maximum FEA performance or engineer optimal FEA structures and circuits. Joule and Nottingham heating have been suggested as damage-causing mechanisms. We have measured the total potential drop (and thus energy loss) in Si FEAs by measuring the energy distribution of the beam.
Keywords
electron field emission; elemental semiconductors; silicon; vacuum microelectronics; Joule heating; Nottingham heating; Si; current density; electron beam energy distribution; emission limiting; energy loss; potential drop; silicon field emitter array; total current; Brightness; Circuits; Current density; Energy measurement; Field emitter arrays; Frequency; Heating; Loss measurement; Power engineering and energy; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location
Asheville, NC, USA
Print_ISBN
0-7803-5096-0
Type
conf
DOI
10.1109/IVMC.1998.728684
Filename
728684
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