Title :
Analysis of a field emission magnetic sensor with compensated electron beam deviation
Author :
Marques, M.I. ; Serena, P.A. ; Nicolaescu, D. ; Itoh, J.
Author_Institution :
Dept. de Fisica de Mater., Univ. Autonoma de Madrid, Spain
Abstract :
Several results have been reported so far as concerns magnetic sensors based on field emission arrays. In this paper, a new concept magnetic sensor is proposed and its operation is analysed using a numerical model. The sensor comprises an array of integrated electron emitters each one formed by a tip at voltage V/sub t/, and two deflection electrodes at potentials +V/2 and -V/2. The deflection of the beam due to the Lorentz force can be compensated by a suitable choice of the electric field formed between the electrodes. In this way, a correlation V(B) between the voltage V applied between two electrodes and the magnetic field B to be measured is obtained.
Keywords :
electron field emission; magnetic sensors; vacuum microelectronics; Lorentz force; deflection electrode; electric field; electron beam deviation compensation; field emission array; magnetic field measurement; magnetic sensor; numerical model; Acceleration; Detectors; Electrodes; Electron beams; Magnetic analysis; Magnetic field measurement; Magnetic fields; Magnetic sensors; Sensor arrays; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728690