Title :
Observation of a new type of field-induced electron emission from a diamond-based heterostructure
Author :
Chen, J. ; Deng, S.Z. ; Xu, N.S. ; Wu, K.H. ; Wang, E.G.
Author_Institution :
Dept. of Phys., Zhongshan Univ., Guangzhou, China
Abstract :
The nitrogen-doped diamond films were deposited on Mo substrates by Microwave Plasma Enhanced CVD using N/sub 2//CH/sub 4/, as feedstock. A two-layer structure consisting of a a-Mo/sub 2/C buffer layer and diamond film was formed. Their field-induced electron emission characteristics, i.e., I-V characteristics and distribution of emission sites were studied using the Transparent Anode Imaging Technique. Repeatable abrupt change of "on" and "off" states of emission was observed at two corresponding specific fields during circling of both increasing and decreasing applied gap field. A plausible explanation is given to this new type of field-induced electron emission phenomenon.
Keywords :
diamond; electron field emission; plasma CVD coatings; C:N-Mo/sub 2/C; I-V characteristics; Mo substrate; a-Mo/sub 2/C buffer layer; field-induced electron emission; heterostructure; microwave plasma enhanced CVD; nitrogen-doped diamond film; transparent anode imaging; Anodes; Breakdown voltage; Buffer layers; Electric breakdown; Electron emission; Nitrogen; Nuclear and plasma sciences; Physics; Plasma properties; Substrates;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728700