Title :
Cold cathode electron emission properties of nanocrystalline diamond thin films
Author :
Krauss, A.R. ; McCauley, T.G. ; Gruen, D.M. ; Ding, M. ; Corrigan, T. ; Auciello, O. ; Chang, R.P.H. ; Kordesch, M. ; Nemanich, R. ; English, S. ; Breskin, A. ; Shefer, E. ; Chechyk, R. ; Lifshitz, Y. ; Grossman, E. ; Temple, D. ; McGuire, G. ; Pimenov, S
Author_Institution :
Div. of Mater. Sci., Argonne Nat. Lab., IL, USA
Abstract :
We have developed several methods for producing nanocrystalline diamond thin films with electron emission thresholds in the 2-5 volt/micron range. The films are grown in Ar-C/sub 60/-H/sub 2/, Ar-CH/sub 4/, Ar-CH/sub 4/-H/sub 2/, Ar-CH/sub 4/-N/sub 2/, and N/sub 2/-CH/sub 4/ microwave plasmas. Although they are all nanocrystalline, with grain sizes ranging from /spl sim/5 to 100 nm, they differ in details of their morphology and electronic properties. Photoemission yields and STM images indicate that topographically enhanced electric fields may play a role in the low thresholds observed for some of these films; however, for other films, the required field enhancement is much too large to be explained in terms of local surface topography on a diamond surface, but the observed low emission thresholds appear to be associated with enhanced interband state density.
Keywords :
cathodes; diamond; electron field emission; nanostructured materials; plasma CVD coatings; C; STM imaging; cold cathode; electron emission; electronic properties; grain size; microwave plasma CVD; morphology; nanocrystalline diamond thin film; photoemission yield; Cathodes; Electron emission; Hydrogen; Materials science and technology; Physics; Plasma properties; Semiconductor films; Surface morphology; Surface topography; Transistors;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728708