Title :
Micromachining for sub-10nm flying height sliders
Author :
Mingsheng Zhang ; Gonzaga, L. ; Yuet Sim Hor ; Bo Liu
Author_Institution :
Data Storage Institute
Abstract :
The key slider fabrication processes such as roughness control on the ABS, curvature control and adjustment on the ABS, pole-tip recession (PTR) control and ICP reactive ion etching of AlTiC with CF4 are discussed in this paper. The optimized process results and the fabricated pic0 and femto sliders with 6 nm flying height are presented.
Keywords :
Dry etching; Fabrication; Micromachining; Rough surfaces; Stress control; Surface charging; Surface roughness; Ultrafast electronics;
Conference_Titel :
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
0-7803-7509-2
DOI :
10.1109/APMRC.2002.1037666
