Title :
Fly height measurement technology below 10 nm [HDD]
Author :
Yamamoto, Steven Y. ; Shi, Rui-Fang
Author_Institution :
Diamond Div., KLA-Tencor, San Diego, CA, USA
Abstract :
This poster describes recent advances in fly height (FH) measurement technology for rigid disk drives. Such advances have become necessary as fly heights (i.e. the spacing between the head and the disk in a rigid disk drive) drop below 10 nm, giving rise to new measurement challenges, especially in the area of slider calibration. New algorithms have been developed that enable accurate measurements (95% confidence int. /spl sim/1 nm) with low one sigma (/spl sim/0.5 nm) at low fly heights (mean FH /spl sim/9 nm).
Keywords :
calibration; disc drives; hard discs; height measurement; magnetic heads; 10 nm; 9 nm; fly height measurement technology; head-disk spacing; measurement algorithms; measurement confidence interval; rigid disk drives; slider calibration; Area measurement; Calibration; Disk drives; Distance measurement; Glass; Optical interferometry; Optical materials; Optical sensors; Reflectivity; Testing;
Conference_Titel :
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
0-7803-7509-2
DOI :
10.1109/APMRC.2002.1037684