Title :
Low-voltage electron emission from CVD graphite films
Author :
Obraztsov, A.N. ; Pavlovsky, I.Yu. ; Volkov, A.P. ; Nagovitsyn, S.P.
Author_Institution :
Dept. of Phys., Moscow State Univ., Russia
Abstract :
We present a comparative study of the field emission from carbon films grown by a CVD method in hydrogen-methane plasma activated by dc discharge. We varied the deposition process parameters to obtain coatings with different type of carbon atomic coordination: from typical polycrystalline diamond to nanocrystalline graphite.
Keywords :
diamond; electron field emission; graphite; nanostructured materials; plasma CVD; thin films; C; CVD graphite films; CVD method; carbon atomic coordination; carbon films; coatings; dc discharge; field emission; hydrogen-methane plasma; low-voltage electron emission; nanocrystalline graphite; polycrystalline diamond; Carbon dioxide; Cathodes; Crystallization; Diamond-like carbon; Electron emission; Fabrication; Flat panel displays; Grain size; Iron; Physics;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728728
