DocumentCode
2320165
Title
A new design of electrostatic microactuator for hard disk drives
Author
Chen, Bangtao ; Zhu, Hong ; Miao, Jianmin
Author_Institution
Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore
fYear
2002
fDate
27-29 Aug. 2002
Abstract
In this paper, we propose a new design of two-stage electrostatic microactuator for hard disk drives. We present and demonstrate the structure characterize of the electrostatic microactuator, the flexure design and some simulation results, and the conclusion.
Keywords
disc drives; electrostatic actuators; hard discs; electrostatic microactuator; hard disk drive; Actuators; Assembly; Bandwidth; Electrodes; Electrostatics; Hard disks; Magnetic heads; Microactuators; Teeth; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location
Singapore
Print_ISBN
0-7803-7509-2
Type
conf
DOI
10.1109/APMRC.2002.1037703
Filename
1037703
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