Title :
A new design of electrostatic microactuator for hard disk drives
Author :
Chen, Bangtao ; Zhu, Hong ; Miao, Jianmin
Author_Institution :
Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore
Abstract :
In this paper, we propose a new design of two-stage electrostatic microactuator for hard disk drives. We present and demonstrate the structure characterize of the electrostatic microactuator, the flexure design and some simulation results, and the conclusion.
Keywords :
disc drives; electrostatic actuators; hard discs; electrostatic microactuator; hard disk drive; Actuators; Assembly; Bandwidth; Electrodes; Electrostatics; Hard disks; Magnetic heads; Microactuators; Teeth; Voltage;
Conference_Titel :
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
0-7803-7509-2
DOI :
10.1109/APMRC.2002.1037703
