Title :
Effect of heat treatment of diamond films on field emission property
Author :
Shim, J.Y. ; Chi, E.J. ; Baik, H.K. ; Song, K.M. ; Lee, S.M.
Author_Institution :
Dept. of Metall. Eng., Yonsei Univ., Seoul, South Korea
Abstract :
We have investigated structural and electrical properties of the undoped diamond films prepared by hot filament CVD. It is found that after annealing the as-grown diamond films the resistivity increased significantly due to the dehydrogenation confirmed by FTIR. The field emission property of the as-grown diamond films degraded significantly after annealed in nitrogen ambient. The reason for the degradation is discussed by comparing hydrogen bonding with resistivity.
Keywords :
CVD coatings; annealing; diamond; electrical resistivity; electron field emission; C:H; FTIR spectra; annealing; dehydrogenation; diamond film; electrical resistivity; field emission; heat treatment; hot filament CVD; hydrogen bonding; structure; Annealing; Bonding; Conductivity; Electron emission; Heat treatment; Hydrogen; Nitrogen; Solid state circuits; Spectroscopy; Thermal degradation;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728749
