Title :
The effect of substitutional nitrogen incorporation on electron emission from CVD diamond
Author :
Park, M. ; Choi, W.B. ; Schlesser, R. ; Sowers, A.T. ; Bergman, L. ; Nemanich, R.J. ; Sitar, Z. ; Hren, J.J. ; Cuomo, J.J.
Author_Institution :
Dept. of Mater. Sci. & Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
Nitrogen-doped CVD diamond films with varying substitutional nitrogen content were prepared. Relatively large amounts of substitutional nitrogen were successfully incorporated into the growing diamond without degrading the quality of the diamond when melamine (C/sub 3/H/sub 6/N/sub 6/) was used as a dopant precursor. It was found that substitutional nitrogen doping has a negligible effect on the electron emission properties of the CVD diamond films. Field emission characteristics from diamond powder coated emitters were also investigated. The effect of substitutional nitrogen incorporation on field emission from diamond is discussed.
Keywords :
CVD coatings; diamond; electron field emission; nitrogen; C:N; CVD diamond film; diamond powder coating; field electron emission; melamine precursor; substitutional nitrogen doping; Doping; Electron emission; Nitrogen; Photoluminescence; Physics; Plasma measurements; Plasma temperature; Powders; Scanning electron microscopy; Spectroscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728750