The effect of substitutional nitrogen incorporation on electron emission from CVD diamond

Author

Park, M. ; Choi, W.B. ; Schlesser, R. ; Sowers, A.T. ; Bergman, L. ; Nemanich, R.J. ; Sitar, Z. ; Hren, J.J. ; Cuomo, J.J.

Author_Institution

Dept. of Mater. Sci. & Eng., North Carolina State Univ., Raleigh, NC, USA

fYear

1998

fDate

19-24 July 1998

Firstpage

269

Lastpage

270

Abstract

Nitrogen-doped CVD diamond films with varying substitutional nitrogen content were prepared. Relatively large amounts of substitutional nitrogen were successfully incorporated into the growing diamond without degrading the quality of the diamond when melamine (C/sub 3/H/sub 6/N/sub 6/) was used as a dopant precursor. It was found that substitutional nitrogen doping has a negligible effect on the electron emission properties of the CVD diamond films. Field emission characteristics from diamond powder coated emitters were also investigated. The effect of substitutional nitrogen incorporation on field emission from diamond is discussed.

Keywords

CVD coatings; diamond; electron field emission; nitrogen; C:N; CVD diamond film; diamond powder coating; field electron emission; melamine precursor; substitutional nitrogen doping; Doping; Electron emission; Nitrogen; Photoluminescence; Physics; Plasma measurements; Plasma temperature; Powders; Scanning electron microscopy; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1998. Eleventh International

Conference_Location

Asheville, NC, USA

Print_ISBN

0-7803-5096-0

Type

conf

DOI

10.1109/IVMC.1998.728750

Filename

728750