• DocumentCode
    2320455
  • Title

    InGaN/GaN field emitters with a piezoelectrically-lowered surface barrier

  • Author

    Underwood, Robert D. ; Kozodoy, Peter ; Keller, Stacia ; BenBaars, S.P. ; Mishra, Umesh K.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
  • fYear
    1998
  • fDate
    19-24 July 1998
  • Firstpage
    283
  • Lastpage
    284
  • Abstract
    The operating characteristics of field emitters are exponentially dependent on two device parameters: the field enhancement factor and the surface energy barrier height. In addition to these device parameters, the practical use of field emitters as electron sources is dependent on the stability and uniformity of field emission. We have investigated field emission from GaN field emitters because GaN has a high resistance to sputtering and is chemically inert. One drawback of GaN field emitters is that they are not easily sharpened. Thus, to lower the operating voltage of GaN-based field emitters we have investigated the lowering of the surface energy barrier using a strained-layer of InGaN on GaN field. The piezoelectric polarization produced in the strained InGaN forms a dipole much like the dipole formed by coating a surface with an electropositive adsorbate.
  • Keywords
    III-V semiconductors; electron field emission; gallium compounds; indium compounds; piezoelectric semiconductors; InGaN-GaN; InGaN/GaN field emitter; electron source; field emission; field enhancement factor; piezoelectric polarization; strained layer; surface energy barrier height; Chemicals; Coatings; Electron sources; Energy barrier; Gallium nitride; Piezoelectric polarization; Sputtering; Stability; Surface resistance; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1998. Eleventh International
  • Conference_Location
    Asheville, NC, USA
  • Print_ISBN
    0-7803-5096-0
  • Type

    conf

  • DOI
    10.1109/IVMC.1998.728758
  • Filename
    728758