DocumentCode
2320455
Title
InGaN/GaN field emitters with a piezoelectrically-lowered surface barrier
Author
Underwood, Robert D. ; Kozodoy, Peter ; Keller, Stacia ; BenBaars, S.P. ; Mishra, Umesh K.
Author_Institution
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
fYear
1998
fDate
19-24 July 1998
Firstpage
283
Lastpage
284
Abstract
The operating characteristics of field emitters are exponentially dependent on two device parameters: the field enhancement factor and the surface energy barrier height. In addition to these device parameters, the practical use of field emitters as electron sources is dependent on the stability and uniformity of field emission. We have investigated field emission from GaN field emitters because GaN has a high resistance to sputtering and is chemically inert. One drawback of GaN field emitters is that they are not easily sharpened. Thus, to lower the operating voltage of GaN-based field emitters we have investigated the lowering of the surface energy barrier using a strained-layer of InGaN on GaN field. The piezoelectric polarization produced in the strained InGaN forms a dipole much like the dipole formed by coating a surface with an electropositive adsorbate.
Keywords
III-V semiconductors; electron field emission; gallium compounds; indium compounds; piezoelectric semiconductors; InGaN-GaN; InGaN/GaN field emitter; electron source; field emission; field enhancement factor; piezoelectric polarization; strained layer; surface energy barrier height; Chemicals; Coatings; Electron sources; Energy barrier; Gallium nitride; Piezoelectric polarization; Sputtering; Stability; Surface resistance; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location
Asheville, NC, USA
Print_ISBN
0-7803-5096-0
Type
conf
DOI
10.1109/IVMC.1998.728758
Filename
728758
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