Title :
Reliability tests on micro-insert die bonding technology
Author :
Nowodzinski, Antoine ; Boutry, Herve ; Franiatte, Remy ; Mandrillon, Vincent ; Anciant, Romain ; Verrun, Sophie ; Simon, Gilles
Author_Institution :
Dept. of Silicon Component, CEA, Grenoble, France
Abstract :
Micro-insert technology is a wafer level stacking technology offering main advantages such as simplicity, low cost and compatibility with chip assembly technologies. This paper presents recent preliminary reliability tests results. Thermal cycling tests between -40°C and 125°C and damp heat tests at 85%RH/85°C are performed, tests results show that micro-insert technology is very robust. A interesting correlation is found between initial interconnection electrical resistance and time to failure during damp heat test, allowing die sorting for reliability.
Keywords :
bonding processes; microassembling; reliability; wafer level packaging; chip assembly technologies; damp heat tests; die sorting; initial interconnection electrical resistance; microinsert die bonding technology; preliminary reliability tests; temperature -40 degC to 125 degC; thermal cycling tests; wafer level stacking technology; Aluminum; Annealing; Force; Polymers; Semiconductor device reliability; Spectroscopy; Reliability; die-bonding; micro-bump; micro-insert;
Conference_Titel :
Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International
Conference_Location :
Grenoble
Print_ISBN :
978-1-4673-1717-7
DOI :
10.1109/ISCDG.2012.6359983